The 6 inch vertical furnace quartz pedestal is engineered to deliver stable, high-purity support for wafer stacks during vertical furnace processes such as oxidation, diffusion, and annealing. Made from high-purity fused quartz, it offers excellent thermal shock resistance and chemical inertness, ensuring long-term reliability in high-temperature environments.

Designed specifically for vertical loading systems, this pedestal maintains precise alignment and spacing between wafers or wafer carriers, promoting consistent thermal distribution and gas flow across all process zones. Its robust construction resists deformation under heat and load, minimizing mechanical stress on wafers. An essential component in vertical furnace applications, this quartz pedestal supports process repeatability and high-yield outcomes in advanced semiconductor manufacturing.