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Quartz Boat

product details

The 6 inch high-purity quartz wafer boat is specifically designed for ultra-clean wafer processing in high-temperature semiconductor applications. Manufactured from ≥99.99% pure quartz, it provides excellent resistance to thermal shock, corrosion, and contamination, making it ideal for diffusion, oxidation, LPCVD, and annealing processes.

Engineered to perform reliably under repeated furnace use, this quartz wafer boat is compatible with standard 6-inch wafer handling systems and horizontal furnace platforms. Custom slot configurations and reinforced options are available to meet specific process requirements. This is the preferred choice for semiconductor fabs and research facilities seeking high purity, structural precision, and process consistency.

Contact us
  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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