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Baffle Boat

product details

The 6 inch quartz baffle boat is a specialized wafer holding solution designed to optimize gas flow dynamics and thermal uniformity during semiconductor furnace processing. Made from high-purity fused quartz, this boat integrates precision-engineered baffle structures that help regulate the distribution of process gases—enhancing film uniformity and reducing wafer-to-wafer variation in diffusion, oxidation, LPCVD, and other thermal treatments.

The baffle design not only improves laminar flow across wafer surfaces but also acts as a barrier to backstreaming contaminants, contributing to cleaner processing environments and higher device yields. Each quartz baffle boat is manufactured to exacting tolerances to ensure stable wafer support, consistent spacing, and compatibility with automated loading systems.

Contact us
  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

we are committed to serving quality.

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